Chip on wafer infrared lamp

Wed, 24 Jun 2026 01:37:28 +0800

On the fab floor, a 0.1°C drift during the photoresist bake can move linewidths and turn good wafers into scrap. The chip-on-wafer infrared lamp was built to stop that drift at the source. We designed it for wafer-level thermal control, where the thermal budget is tight and repeatability is the only acceptable baseline. What matters, technically We run near-infrared (NIR) quartz-halogen emitters, tuned so the energy couples straight into the photoresist and thin films. The system holds wafer-plane uniformity within ±0.1°C across 150–300 mm substrates, and it hits setpoint in under 2 seconds. Temperature repeatability from soft bake to hard bake lands at ±0.5°C, so critical dimensions stay locked. The lamp head is cleanroom-ready for Class 1–100, built with low-outgassing materials and a particle-controlled path. Zero particle generation is verified in-situ during standard bake cycles. Why it holds up in production In lithography clusters, the bake profile stays consistent—no hot spots, no edge overshoot—so you cut rework and keep yield moving. Energy use drops because NIR heats the film, not the carrier. Reliability is built for 24/7 ops, with MTBF in the tens of thousands of hours and service windows that line up with planned downtime, not emergency calls. What you need to plan for The lamp works with standard SEMI interfaces, but integration means matching your chuck material and reflector geometry to the bake plate. You’ll run a short commissioning pass to calibrate emissivity and map zones for your exact stack. One constraint is thermal crosstalk. When you’re running mixed films on the same tool, adjacent zones need guard bands in the tuning.

Chip on Smart Quartz Infrared Heaters

Chip on wafer infrared lamp